3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS
نویسندگان
چکیده
منابع مشابه
Femtosecond laser fabrication of high reflectivity micromirrors
High-quality freestanding micromirrors consisting of 40 dielectric layers on silicon have been fabricated by ultrashort-pulse laser ablation in combination with laser-assisted wet chemical etching. Backside material removal enables direct access to both faces of the dielectric coating. The amplitude reflectance of the micromirrors has been determined by Fabry–Pérot interferometry; a finesse in ...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2011
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-011-1362-3